Dr. Futuer
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منابع مشابه
Ultrathin Oxide on Polysilicon by ECR(Electron Cyclotron Resonance) N2O Plasma
We have developed a process of growing ultrathin oxide on polysilicon layer by using Electron Cyclotron Resonance (ECR) N2O plasma. Sub-4 nm thick polyoxide on n+ and p+ polysilicon layer were grown and characterized. The oxides have relatively large breakdown voltage, small electron trapping and QBD up to 7 C/ for polyoxide on p+ cm2 polysilicon and up to 5 C/ for polyoxide on n+ polysilicon u...
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ورودعنوان ژورنال:
- The Ulster Medical Journal
دوره 8 شماره
صفحات -
تاریخ انتشار 1939